Molecular Layer Deposition of Hybrid Organic‐Inorganic Polymer Films using Diethylzinc and Ethylene Glycol

@inproceedings{Yoon2009MolecularLD,
  title={Molecular Layer Deposition of Hybrid Organic‐Inorganic Polymer Films using Diethylzinc and Ethylene Glycol},
  author={Byunghoon Yoon and Jennifer L. O'Patchen and Dragos Seghete and Andrew S. Cavanagh and Steven M. George},
  year={2009}
}
The molecular layer deposition (MLD) of a hybrid organic-inorganic polymer based on zinc is demonstrated using sequential exposures of diethyl zinc (DEZ, Zn(CH2CH3)2) and ethylene glycol (EG, HOCH2CH2OH). This polymer is representative of a class of zinc alkoxide polymers with an approximate formula of (� ZnORO� )n that can be called ''zincones''. The film growth and surface chemistry during zincone MLD is studied using in-situ Fourier transform infrared (FTIR) measurements. The absorbance of… CONTINUE READING
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