Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of ( Ultra ) Nanocrystalline Diamond Films

@inproceedings{Eckert2008MolecularDS,
  title={Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of ( Ultra ) Nanocrystalline Diamond Films},
  author={Maxie Eckert and Erik C Neyts and Annemie Bogaerts},
  year={2008}
}
The reaction behavior of species that may affect the growth of ultrananocrystalline and nanocrystalline diamond ((U)NCD) films is investigated by means of molecular dynamics simulations. Impacts of CHx (x 1⁄4 0 4), C2Hx (x1⁄4 0 – 6), C3Hx (x1⁄4 0 – 2), C4Hx (x1⁄4 0 – 2), H, and H2 on clean and hydrogenated diamond (100)2T 1 and (111)1T 1 surfaces at two different substrate temperatures are simulated.We find that the different bonding structures of the two surfaces cause different temperature… CONTINUE READING