Moisture-Induced Surface Corrosion in AZO Thin Films Formed by Atomic Layer Deposition

Abstract

Aluminum-doped zinc oxide (AZO) thin film is a viable alternative to tin-doped indium oxide, the dominant transparent conducting oxide used in solar cells. The durability of the AZO thin films grown by atomic layer deposition technique, which is known to form layers with atomic layer precision, is studied. The AZO films were subjected to the harsh… (More)

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