Models and instruments of MEMS analysis with the use of inhibited Petri Nets

@article{Teslyuk2011ModelsAI,
  title={Models and instruments of MEMS analysis with the use of inhibited Petri Nets},
  author={Vasyl Teslyuk and Pavlo Denysyuk and Roman Zaharyuk and Iaroslav Vasyliuk and Yuri Pidlypnyy},
  journal={2011 11th International Conference The Experience of Designing and Application of CAD Systems in Microelectronics (CADSM)},
  year={2011},
  pages={406-407}
}
The developed model for analysis of MEMS structures based on inhibited Petri Nets is presented. Results of analysis are presented. Approaches to development of software for information technology of MEMS analysis and synthesis are offered.