Modelling of cantilever based MEMS RF switch


This paper deals with the electro-mechanical and electro-magnetic model of an electro statically actuated RF MEMS switch, Simple 1-D model for pull-in voltage is presented, along with the 2-port equivalent circuit network representation used for series switch. The Mechanical, Electrostatic and Electromagnetic analysis of the designed miniature RF MEMS… (More)


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