Modelling of Electromagnetic Transducers Generating Ultrasonic Waves Lamba-type in Silicon Microsensors

  • JACEK GOLEBIOWSKI

Abstract

The construction of the membrane microsensor with electromagnetic transducer (EMT) to the ultrasonic wave Lamba-type generation was presented. The conditions of the wave propagation were also described. The possibilities of the fabrication of multilayer membranes on the silicon base using the microelectronics’ technologies were shown. The model of sensor… (More)

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