Modelling and Simulation of a Pneumatically Actuated Micropump

@article{Nedelcu2007ModellingAS,
  title={Modelling and Simulation of a Pneumatically Actuated Micropump},
  author={O. T. Nedelcu and J.-L. Morelle and Catalin Tibeica and Samule Voccia and Iuliana Codreanu and Steffen Dahms},
  journal={2007 International Semiconductor Conference},
  year={2007},
  volume={1},
  pages={77-80}
}
Performances of a pneumatically actuated micropump are described. Simulation results combined to an analytical model are used to optimize the micropump design in order to obtain a working frequency of 10 Hz for pneumatic pressure varying between 0.1-6 bar. A pneumatic chamber is placed between a polymer membrane to be actuated, and microchannels connected to a vacuum system. Time for pressurizing cycle and vacuum cycle as function of design parameters and relative pressure are calculated. 

Citations

Publications citing this paper.
SHOWING 1-2 OF 2 CITATIONS

References

Publications referenced by this paper.
SHOWING 1-2 OF 2 REFERENCES

A review of microvalves

Oh.W. Kwang, Ahn H. Chong
  • Journal of Micromechanics and Microengineering,
  • 2006
VIEW 1 EXCERPT