Modeling of power devices with Drift Region Integrated Microchannel Cooler

  title={Modeling of power devices with Drift Region Integrated Microchannel Cooler},
  author={Kremena Vladimirova and Yvan Avenas and Jean-Christophe Crebier and Christian Schaeffer and Fabien Lebouc and Mansour Tawk},
  journal={2011 17th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)},
This paper introduces the DRIMCooler — an innovative concept allowing to locate the heat exchanger directly inside the active region of a vertical power device. Based on vertical edge termination technique and the use of dielectric coolant fluid circulation, arrays of through wafer channels are drilled in the silicon substrate offering a large heat exchange coefficient while minimizing the pressure drops. The concept is introduced and discussed with respect to technological and electrical… CONTINUE READING


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