Modeling of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes

Abstract

This paper presents a system-level, physic-based compact model of a novel out-of-plane capacitive MEMS transducer based on a combination of plate- and comb-capacitor drives. Unlike conventional plate-capacitor-like transducers both electrodes of this novel device are movable. This feature results in a device dynamics analogous to a weakly coupled two-degree… (More)

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