• Corpus ID: 1358066

Modeling of T-Shaped Microcantilever Resonators

  title={Modeling of T-Shaped Microcantilever Resonators},
  author={Margarita Sofia Narducci and Eduard Figueras and Isabel Gr{\`a}cia and Luis Fonseca and Joaquin Santander and Carles Can{\'e}},
The extensive research and development of micromechanical resonators is trying to allow the u se of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good platform due to its excellent mechanical properties. A cantileve r working in dynamic mode, adjust its resonance frequ ency depending on changes in both, the spring constant ( k ) and mass ( m ) of the resonator. The aim of this work was to model a cantilever… 
Modeling of I-, T- and V-Shaped Microcantilevers for Environmental Monitoring
This paper describes a model of microcantilever to determine the optimal dimensions that can be used for environmental monitoring. Three types, which are usually used i.e., I-, T- and V-shaped
Resonant characteristics of rectangular hammerhead microcantilevers vibrating laterally in viscous liquid media
The resonant characteristics of laterally vibrating rectangular hammerhead microcantilevers in viscous liquid media are investigated. The rectangular hammerhead microcantilever is modeled as an
A high sensitivity silicon microcantilever based mass sensor
A silicon microcantilever based mass sensor with picogram resolution has been fabricated. In order to improve its sensitivity value, resonator dimensions were reduced. Working in dynamic mode, the
The State of Art Survey on Micro cantilevers for MEMS Devices
Arrival of Micro-electromechanical system (MEMS) in the last decade has been immense and ever growing. MEMS is an expanding and fast growing technology with an extensive range of applications. Micro
Theoretical Analysis of Laterally Vibrating Hammerhead Microcantilever Sensors in a Viscous Liquid
THEORETICAL ANALYSIS OF LATERALLY VIBRATING HAMMERHEAD MICROCANTILEVER SENSORS IN A VISCOUS LIQUID Jinjin Zhang, B.E., M.E. Marquette University, 2013 Dynamically driven prismatic microcantilevers
Design and simulation of mass sensors based on horizontally actuated silicon cantilevers
Display Omitted Design of mass sensor based in polysilicon microcantilever.Operation in free oscillation with the detection of frequency and settling time shifts.Simulation of electromechanical
Impact of Geometry on the Performance of Cantilever-Based Piezoelectric Vibration Energy Harvesters
This paper aims at comparing micromachined cantilever structures with the purpose of providing design guidelines towards high performance energy harvesters such that they provide a good output power,
Active and Passive Control of Flow Past a Cavity
Flow past open cavities is well known to give rise to highly coherent and self-sustained oscillations, leading to undesirable aeroacoustic resonance. Cavity flows are encountered not only in
MEMS piezoelectric vibrational energy harvesters and circuits for IoT applications
In the Internet of Things (IoT) world, more and more sensor nodes are being deployed and more mobile power sources are required. Alternative solutions to batteries are the subjects of worldwide


Dimension-Scaling of Microcantilevers Resonators
In order to analyze the influence of the dimension-scaling on the sensitivity of a cantilever, a set of microcantilevers resonators were designed, fabricated and subsequently scaled. The cantilevers
FEM Simulation and Characterization of Microcantilevers Resonators
This work has been focused on the design, simulation, fabrication and characterisation of cantilevers structures that include the excitation element and a bending sensor. Structures have been
Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature
The dependence of the resonance frequency of thermally excited microcantilever resonators on temperature has been reported by several papers. All these papers ignored the film grown or deposited on
Investigation of energy loss mechanisms in micromechanical resonators
  • R. Candler, H. Li, +4 authors T. Kenny
  • Materials Science
    TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003
Micromechanical resonators with resonant frequencies from 500 kHz to 10 MHz were built and examined for several energy loss mechanisms. Thermoelastic damping, clamping loss and air damping were
Nanoelectromechanical Systems
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving
Modeling and design of composite freefree beam piezoelectric resonators
The model is shown to successfully predict resonance frequencies in agreement with the results of finite element analysis and experimental results obtained for multi-layered lead zirconate titanate (PZT) piezoelectric microresonators with first natural frequencies in the range of 448 kHz to 1.1 MHz.
Stress-induced mass detection with a micromechanical/nanomechanical silicon resonator
The potential ability of micromechanical/nanomechanical silicon resonators with thicknesses of 500 and 146 nm to detect mass and charge in an ion attachment is investigated in vacuum. Low-energy ions
Nanoelectromechanical systems
Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force
Micro-cantilevers for gas sensing
Cantilevers fabricated from a SOI wafers using bulk micromachining are used in combination with polymer deposition to detect down to 25 ppm of toluene concentration in synthetic air. The cantilevers
MEMS-Based Silicon Nitride Thin Film Materials and Devices at Cryogenic Temperatures for Space Applications