Modeling of MEMS capacitive differential pressure sensor

@article{Eswaran2013ModelingOM,
  title={Modeling of MEMS capacitive differential pressure sensor},
  author={P. Eswaran and S. Malarvizhi},
  journal={2013 International Conference on Circuits, Power and Computing Technologies (ICCPCT)},
  year={2013},
  pages={699-702}
}
In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS) structure was proposed. The-working principle of CDPS was explained. Different types of CDPS structure for aircraft altimeter were designed. Polymide square diaphragm membrane is used to sense the pressure. Simulation was carried out for the range of pressure from 116 mbar to 1100 mbar, which is equivalent to aircraft flying altitude. Analysis was done with simulation results for centre deflection… CONTINUE READING
6 Citations
12 References
Similar Papers

References

Publications referenced by this paper.
Showing 1-10 of 12 references

Eswaran.P, Malarvizhi.S, Simulation analysis of MEMS based Capacitive Differential Pressure sensor for aircraft application

  • Journal on Advanced Material Research,
  • 2012

Shannon , Smooth Contact Capacitive Press ure Sensors in Touchand PeelingMode Operation

  • Jeahyeong Han, A. Mark
  • IEEE Sensors Journal
  • 2009

Elbelkaacemi, "A novel Capacitive press ure sensor with high sensitivity and quasi-linear response'

  • Aziz Ettouhami, Noureddine Zahid, Mourad
  • Journal of C.R.Mecanique,
  • 2004

Wise , " Batch Processed Vacuum sealed Capacitive Pressure Sensor " , Journal of Microelectromechanical system

  • AbhijeetV. Chavan, D. Kensall
  • Journal of C . R . Mecanique
  • 2004

Design and simulation of MEMS based comb drive pressure sensor for pediatric post operative monitoring

  • Duck-Bong Seo, Robin Shandas
  • Summer Bioengineering Conference,
  • 2003

G.Allen, "Robust capacitive press ure sensor array'

  • Sung-Pil Chang, Jeong-Bing Lee, Mark
  • Sensor and Actuator A
  • 2002

Modeling of touch mode capacitive sensors and diaphragms

  • Qiang Wang, Wen H. Ko
  • Sensors and Actuators A
  • 1999

Similar Papers

Loading similar papers…