Modeling of MEMS capacitive differential pressure sensor

  title={Modeling of MEMS capacitive differential pressure sensor},
  author={P. Eswaran and S. Malarvizhi},
  journal={2013 International Conference on Circuits, Power and Computing Technologies (ICCPCT)},
In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS) structure was proposed. The-working principle of CDPS was explained. Different types of CDPS structure for aircraft altimeter were designed. Polymide square diaphragm membrane is used to sense the pressure. Simulation was carried out for the range of pressure from 116 mbar to 1100 mbar, which is equivalent to aircraft flying altitude. Analysis was done with simulation results for centre deflection… CONTINUE READING
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