Modeling and vector control of a planar magnetic levitator

@article{Kim1997ModelingAV,
  title={Modeling and vector control of a planar magnetic levitator},
  author={Won-jong Kim and David L. Trumper and Jeffrey H. Lang},
  journal={IAS '97. Conference Record of the 1997 IEEE Industry Applications Conference Thirty-Second IAS Annual Meeting},
  year={1997},
  volume={1},
  pages={349-356 vol.1}
}
The authors designed and implemented a magnetically levitated stage with large planar motion capability. This positioning system is the first capable of providing all the motions required for photolithography in semiconductor manufacturing with only a single moving part. This planar magnetic levitator employs four novel permanent-magnet linear motors which generate vertical force for suspension against gravity, and horizontal force for drive. In this paper, the authors discuss electromechanical… CONTINUE READING

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