Modeling and characterization of a cantilever-based near-field scanning microwave impedance microscope.

@article{Lai2008ModelingAC,
  title={Modeling and characterization of a cantilever-based near-field scanning microwave impedance microscope.},
  author={Keji Lai and Worasom Kundhikanjana and Michael A. Kelly and Ze Xiang Shen},
  journal={The Review of scientific instruments},
  year={2008},
  volume={79 6},
  pages={063703}
}
This paper presents a detailed modeling and characterization of a microfabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis, we model the tip-sample interaction as small impedance changes between the tip electrode and the ground at our working frequencies near 1 GHz. The equivalent lumped elements of the cantilever can be determined by transmission line simulation of the matching network, which routes the cantilever… CONTINUE READING
Highly Cited
This paper has 41 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 29 extracted citations

Similar Papers

Loading similar papers…