Modeling and Control of AFM-based Nano-manipulation Systems

  title={Modeling and Control of AFM-based Nano-manipulation Systems},
  author={Khalid El Rifai and Osamah El Rifai and Kamal Youcef-Toumi},
  journal={Proceedings of the 2005 IEEE International Conference on Robotics and Automation},
This paper develops a model and control scheme for nano-manipulation systems based on atomic force microscopes (AFM). The model includes the micro-cantilever's and piezotube actuator's coupled dynamics. An identification-based controller is proposed for piezotube scanner positioning accounting for the piezotube's nonlinear sensitivity and axes coupling. A… CONTINUE READING