Modeling and Characterization of Piezoelectric $d_{33}$ -Mode MEMS Energy Harvester

  title={Modeling and Characterization of Piezoelectric \$d_\{33\}\$ -Mode MEMS Energy Harvester},
  author={Jong Cheol Park and Jae Yeong Park and Y. O. Lee},
  journal={Journal of Microelectromechanical Systems},
This paper presents the modeling, fabrication, and characterization of a piezoelectric microelectromechanical systems (MEMS) energy harvester using a d33 piezoelectric mode. A theoretical analysis and an analytical modeling for the d33-mode device were first performed to estimate the output power as a function of the material parameters and device geometry. A PbTiO3 seed layer was newly applied as an interlayer between the ZrO2 and Pb(Zr0.52Ti0.48)O3 (PZT) thin films to improve the… CONTINUE READING
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