Modeling and Characterization of Cantilever-Based MEMS Piezoelectric Sensors and Actuators

  title={Modeling and Characterization of Cantilever-Based MEMS Piezoelectric Sensors and Actuators},
  author={Romie Littrell and Karl Grosh},
  journal={Journal of Microelectromechanical Systems},
Piezoelectric materials are used in a number of applications including those in microelectromechanical systems. These materials offer characteristics that provide unique advantages for both sensing and actuating. Common implementations of piezoelectric transduction involve the use of a cantilever with several layers, some of which are piezoelectric. Although most analyses of such a cantilever assume small piezoelectric coupling (SPC), the validity of this assumption has not been fully… CONTINUE READING
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