Modeling Litho-Constrained Design Layout

  title={Modeling Litho-Constrained Design Layout},
  author={Min-Chun Tsai and Daniel Zhang and Zongwu Tang},
  journal={2007 44th ACM/IEEE Design Automation Conference},
This paper derived a method of modeling litho-constrained layout in design stage. The model applies directly on design layout and does not require mask-synthesis steps. Results show we can capture design-relevant litho "hot-spots" within a matter of an hour on a large full-chip data. This method proves that the hot-spot information is embedded in original design layout and can be extracted with strong signal. This method enables a designer to correct real hot-spots before tape-out. It provides… CONTINUE READING


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