Modeling Interaction in Nanowire Growth Process Toward Improved Yield

@article{Aghdam2017ModelingII,
  title={Modeling Interaction in Nanowire Growth Process Toward Improved Yield},
  author={Faranak Fathi Aghdam and Haitao Liao and Qiang Huang},
  journal={IEEE Transactions on Automation Science and Engineering},
  year={2017},
  volume={14},
  pages={1139-1149}
}
Research on nanowire growth with patterned arrays of catalyst has shown that wire-to-wire spacing is an important factor affecting nanowire quality. To improve the process yield and the length uniformity of fabricated nanowires, it is important to reduce the resource competition between nanowires during the growth process. In this paper, we propose a physical-statistical nanowire-interaction model considering the shadowing effect and shared substrate diffusion area to determine the optimal… CONTINUE READING

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