Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation

@article{Perez2005ModelingFA,
  title={Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation},
  author={Robert X. Perez and Joel Agnus and C{\'e}dric Cl{\'e}vy and Arnaud Hubert and Nicolas Chaillet},
  journal={IEEE/ASME Transactions on Mechatronics},
  year={2005},
  volume={10},
  pages={161-171}
}
A high-performance compact micromanipulation system is presented. The system, called the microgripper microrobot on chip (MMOC), was developed at Laboratoire d'Automatique de Besancon (LAB), France. Two main parts in the MMOC design of the MMOC are discussed: 1) the piezoactuator and 2) the end-effectors. The micromanipulator is partially fabricated in a clean room and the piezoactuator system has been machined using the ultrasonic technique. Tests of micromanipulation have been carried out… CONTINUE READING

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