Model order reduction of 3D electro-thermal model for a novel micromachined hotplate gas sensor

  title={Model order reduction of 3D electro-thermal model for a novel micromachined hotplate gas sensor},
  author={T. Bechtold and Jan Hildenbrand and Jurgen Wollenstein and J. Korvink},
  journal={5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the},
In this paper we present an automatic, Arnoldi-based model order reduction of a 3D electro-thermal model for a novel sensor device. Model order reduction is essential for achieving a quickly evaluable, yet still accurate, macromodel of the device, needed for system-level simulation. We present below numerical simulation results of the full-scale finite element model and the compact-reduced order model, and show how the nonlinearities in the input function can be treated even with the linear… CONTINUE READING


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