Model based quantification of EELS spectra.

@article{Verbeeck2004ModelBQ,
  title={Model based quantification of EELS spectra.},
  author={Jo Verbeeck and Sandra van Aert},
  journal={Ultramicroscopy},
  year={2004},
  volume={101 2-4},
  pages={207-24}
}
Recent advances in model based quantification of electron energy loss spectra (EELS) are reported. The maximum likelihood method for the estimation of physical parameters describing an EELS spectrum, the validation of the model used in this estimation procedure, and the computation of the attainable precision, that is, the theoretical lower bound on the variance of these estimates, are discussed. Experimental examples on Au and GaAs samples show the power of the maximum likelihood method and… CONTINUE READING
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