• Corpus ID: 247188012

Mode transition ($\alpha-\gamma$) and hysteresis in microwave-driven low-temperature plasmas

@inproceedings{Kim2022ModeT,
title={Mode transition (\$\alpha-\gamma\$) and hysteresis in microwave-driven low-temperature plasmas},
author={Kyungtae Kim and Woojin Nam and Jimo Lee and Seung Hwan Shim and Gunsu S. Yun Division of advanced nuclear engineering and Pohang University of Science and Technology and Dep. of Physics and Mechatronics Research and Samsung Electronics Co. and Ltd.},
year={2022}
}
• Published 1 March 2022
• Physics
Department of physics, Pohang University of Science and Technology (POSTECH) Mechatronics Research, Samsung Electronics Co., Ltd. Abstract We discovered a hysteresis in a microwave-driven low-pressure argon plasma during gas pressure change across the transition region between α and γ discharge modes. The hysteresis is manifested in that the critical pressure of mode transition depends on the direction of pressure change. As a corollary, the plasma would attain different discharge properties…

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