Mo2N/Mo gate MOSFET's

Abstract

Molybdenum nitride coatings on molybdenum, from a direct reaction of molybdenum with ammonia, are used to improve the gate electrode properties of Mo gate self-aligned MOSFET's. A Mo2N double-layer gate shows resistance against oxidation and processing reagents, and improved ion-implantation masking. The work function of the double-layer film was determined… (More)

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