Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing

  title={Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing},
  author={Arun Bhaskar and Justine Philippe and Etienne Okada and Flavie Braud and Jean-François Robillard and Cedric Durand and Fr{\'e}d{\'e}ric Gianesello and Daniel Gloria and Christophe Gaqui{\`e}re and Emmanuel Dubois},
Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing 


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SOI technology for front end applications
  • Z. Shaked, P. Hurwitz, +4 authors M. Racanelli
  • Computer Science
  • 2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS)
  • 2015
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