Miniaturized time-scanning Fourier transform spectrometer based on silicon technology.

@article{Manzardo1999MiniaturizedTF,
  title={Miniaturized time-scanning Fourier transform spectrometer based on silicon technology.},
  author={Omar Manzardo and Hans Peter Herzig and Cornel Marxer and Nico de Rooij},
  journal={Optics letters},
  year={1999},
  volume={24 23},
  pages={1705-7}
}
We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of +/-0.5 mum for a displacement of 38.5 mum . A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is +/-25 nm. The measured resolution of… CONTINUE READING
Highly Cited
This paper has 48 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 32 extracted citations

References

Publications referenced by this paper.
Showing 1-4 of 4 references

Silicon micromechanics for applications in fiber optic communication’

  • C. Marxer
  • Ph.D. dissertation (University of Neuchâtel…
  • 1997

Ehbets, in Optical Spectral Analysis Microsystem, Engleberg, Vol. 16 of EOS Topical Meetings

  • O. Manzardo, P. Kipfer, H. P. Herzig, H. Teichmann, M. T. Gale
  • Digest Series (Centre Suisse d’Electronique et de…
  • 1988

Westenhöfer, in Optical Spectral Analysis Microsystem, Engleberg, Vol. 16 of EOS Topical Meetings Digest Series (Centre

  • H. Teichmann, M. T. Gale, +4 authors J. Pedersen
  • Suisse d’Electronique et de Microtechnique…
  • 1988

Introductory Fourier Transform Spectroscopy (Academic

  • R. J. Bell
  • New York,
  • 1972

Similar Papers

Loading similar papers…