Miniaturized beamsplitters realized by X-ray waveguides.

  title={Miniaturized beamsplitters realized by X-ray waveguides.},
  author={Sarah Hoffmann-Urlaub and Tim Salditt},
  journal={Acta crystallographica. Section A, Foundations and advances},
  volume={72 Pt 5},
This paper reports on the fabrication and characterization of X-ray waveguide beamsplitters. The waveguide channels were manufactured by electron-beam lithography, reactive ion etching and wafer bonding techniques, with an empty (air) channel forming the guiding layer and silicon the cladding material. A focused synchrotron beam is efficiently coupled into… CONTINUE READING