• DOI:10.1364/ol.29.001437
• Corpus ID: 34778862

Miniature lamellar grating interferometer based on silicon technology.

@article{Manzardo2004MiniatureLG,
  title={Miniature lamellar grating interferometer based on silicon technology.},
  author={Omar Manzardo and Roland Michaely and Felix Sch{\"a}delin and Wilfried Noell and T. Overstolz and Nico F. de Rooij and Hans Peter Herzig},
  journal={Optics letters},
  year={2004},
  volume={29 13},
  pages={
          1437-9
        }
}

• O. Manzardo, R. Michaely, +4 authors H. Herzig
• Published 2004
• Physics
• Optics letters

We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended white-light source with a resolution of 1.6 nm at a wavelength of 400 nm and of 5.5 nm at 800 nm. The wavelength accuracy is better than 0.5 nm, and the inspected wavelength range extends from 380 to 1100 nm. The optical path difference maximum is 145 microm. The dimensions of the device are 5 mm x 5 mm.