Miniature fuel cell with conductive silicon electrodes

  title={Miniature fuel cell with conductive silicon electrodes},
  author={Sadao Onoe and Hirotoshi Tanaka and Kota Hoshino and Kiyoshi Matsumoto and Isao Shimoyama},
  journal={The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.},
  pages={1296-1299 Vol. 2}
We report on a direct methanol fuel cell (DMFC) with conductive silicon electrodes. In our design, the electrodes are made of silicon instead of carbon. We fabricated a porous structure at the bottom of the channels using the DRIE process. Pt catalyst was electrodeposited onto the surface of the electrodes. A Nafion 115 membrane was sandwiched between two 280-/spl mu/m-thick electrodes with a microporous structure 30 /spl mu/m thick. Open circuit voltage of 150 mV was observed with 1 M methanol… CONTINUE READING