Millisecond processing beyond chip technology: From electronics to photonics


There is a clear and increasing interest in short time annealing processing far below one second, i.e. the lower limit of Rapid Thermal Processing (RTP) called spike annealing. This was driven by the need of suppressing the so-called Transient Enhanced Diffusion in advanced boron-implanted shallow pn-junctions in silicon technology. Meanwhile the interest… (More)


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@article{Skorupa2007MillisecondPB, title={Millisecond processing beyond chip technology: From electronics to photonics}, author={W. Skorupa and W. Anwand and Matthias Posselt and Slawomir Prucnal and L. Rebohle and M. Voelskow and Sihai Zhou and R. A. McMahon and Miro Smith and T. Gebel and W. Hentsch and Rachel Fendler and T. Luthge and Alessandra Satta and T. M. Borseth and A. S. Kuznetsov and B. S. Svensson}, journal={2007 15th International Conference on Advanced Thermal Processing of Semiconductors}, year={2007}, pages={41-49} }