Millimeter wave application for non-destrucive homogenety characterization of semiconductor and dielectric wafers

@article{Laurinavicius2010MillimeterWA,
  title={Millimeter wave application for non-destrucive homogenety characterization of semiconductor and dielectric wafers},
  author={Albertas Laurinavicius and Tomas Anbinderis},
  journal={18-th INTERNATIONAL CONFERENCE ON MICROWAVES, RADAR AND WIRELESS COMMUNICATIONS},
  year={2010},
  pages={1-4}
}
Millimeter wave technique for non-destructive material homogeneity characterization is described. The idea of this technique is the local excitation of the millimeter waves in the testing plate shape material and the measurement of the transmitted (reflected) wave amplitude and phase in different places of it, i.e. the material plate is scanned by the beam… CONTINUE READING