Microvia fill process model and control

  title={Microvia fill process model and control},
  author={Antti Pohjoranta and Robert Tenno},
  journal={Journal of Mathematical Chemistry},
This paper presents an overview of the modeling and model based control of the microvia fill process. A detailed, general-purpose microvia fill model that utilizes the arbitrary Lagrange–Eulerian method for shape change modeling is presented first. Modeling results are presented and compared with the measured data. Then a simplified model of the process is presented followed by a model based control algorithm being developed based on the simplified stochastic model with typical uncertainties… CONTINUE READING


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