Microstructure of cosputter-deposited metal- and oxide-MoS2 solid lubricant thin films

  • M. R. Hiltona
  • Published 1997


The effect of cosputtering small amounts of Ni (3%, 9%) and SbOx (20%) on the final microstructure of MoS2 lubricant thin films has been studied using a combination of scanning and transmission electron microscopy imaging, and electron and x-ray diffraction techniques. The early-growth, near-interface microstructure of both MoS2 and 3% Ni–MoS2 cosputtered… (More)


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