Microstructure evolution of Ti 3 SiC 2 compound cathodes during reactive cathodic arc evaporation

  • J. Q. Zhua
  • Published 2011

Abstract

The microstructure evolution and compositional variation of Ti3SiC2 cathode surfaces during reactive cathodic arc evaporation are presented for different process conditions. The results show that phase decomposition takes place in the near-surface region, resulting in a 5–50 m thick converted layer that is affected by the presence of nitrogen in the… (More)

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