Microstructure characterization of Mo back contact used for CIGS based solar cell

Abstract

Two separate series of Mo thin films were deposited on Si/SiO2, and soda lime glass (SLG) substrates using direct-current planar magnetron sputtering, with a sputtering power density of 1.2 W/cm2. The working gas (Ar) pressure was varied from 0.6 mT to 16 mT to gain a better understanding of the effect of sputtering pressure on the morphology and porosity… (More)

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