Microstructural characterizations of magnetron sputtered Ti films on glass substrate

@inproceedings{Chawla2009MicrostructuralCO,
  title={Microstructural characterizations of magnetron sputtered Ti films on glass substrate},
  author={Vipin Chawla and R. Jayaganthan and Amit Kumar Chawla and Ramesh Chandra},
  year={2009}
}
Magnetron sputtered Ti thin films deposited on glass substrates under varying deposition parameters were characterized by X-Ray Diffraction, Scanning Electron Microscopy and Atomic Force Microscopy. The textures of the Ti films characterized by X-ray diffraction revealed the initial (1 0 0) preferred orientation but it transformed in to (0 0 2) and (1 0 1) orientation with increase in sputtering power and substrate temperature, respectively. The preferred orientations of (0 0 2) and (1 0 1… CONTINUE READING

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