Microstructural analysis of Nb-doped anatase TiO2 transparent conductive films by transmission electron microscopy

@article{Ogawa2016MicrostructuralAO,
  title={Microstructural analysis of Nb-doped anatase TiO2 transparent conductive films by transmission electron microscopy},
  author={Daisuke Ogawa and Shoichiro Nakao and Kazuo Morikawa and Yasushi Hirose and Tetsuya Hasegawa},
  journal={2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS)},
  year={2016},
  pages={1-1}
}
We investigated microstructures and transport properties of Nb-doped anatase TiO2 (TNO) films deposited by two methods: sputtering and pulsed laser deposition (PLD).We found that working pressure (Pw) of sputtering has a significant influence on both microstructures and transport properties. Cross-sectional observation by transmission electron microscopy revealed that lowered Pw improved homogeneity in the microstructure. This finding indicates that the inhomogeneous microstructure of the… CONTINUE READING