Microsprings and microcantilevers: studies of mechanical response

@inproceedings{Seto2001MicrospringsAM,
  title={Microsprings and microcantilevers: studies of mechanical response},
  author={Mary W. Seto and Brian Dick and Michael J. Brett},
  year={2001}
}
Porous thin films with unique microstructures have been fabricated with the glancing angle deposition technique. This technique utilizes highly oblique deposition angles to make use of initial growth and shadowing conditions, which allow thin films consisting of microsprings and arrays of microcantilevers to be engineered with nanometre scale control. The mechanical properties of these microstructured films were studied with a nanoindentation technique. Several microscopic `springbed' films… CONTINUE READING