Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography

@inproceedings{LoveMicroscopePP,
  title={Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography},
  author={J. Christopher Love and Daniel B. Wolfe and Heiko O. Jacobs and George M Whitesides}
}
This paper demonstrates the application of projection photolithography, using a standard commercial microscope, for the generation of masters for soft lithography. The procedure is rapid and convenient and produces features smaller in size (as small as 0.6 μm) than those available from other methods of rapid prototyping, albeit over a limited area (∼4 × 104 μm2 per exposure). A transparency photomask (prepared using high-resolution printing) is inserted into the light path of the microscope and… CONTINUE READING