Microscale three-dimensional hemispherical shell resonators fabricated from metallic glass

Abstract

A novel use of bulk metallic glasses in microresonator applications is reported and a method for the fabrication of ultra-smooth and highly symmetric three-dimensional wineglass structures with integrated electrode structures is presented. A shell with N=2 modes at 9.393 kHz and 9.401 kHz was characterized for both mounted and unmounted (to the electrode… (More)

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