Conventional chemical oxygen iodine lasers (COIL) offer several important advantages for materials processing, including short wavelength (1.3 μm) and high power. However, COIL lasers typically employ large hardware and use reactants relatively inefficiently. This project is creating an alternative approach called microCOIL. In microCOIL, most conventional components are replaced by a set of silicon MEMS devices that offer smaller hardware and improved performance. A complete microCOIL system includes microchemical reactors, microscale supersonic nozzles, and micropumps. System models incorporating all of these elements predict significant performance advantages in the microCOIL approach .