Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides.

Abstract

We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (4 μm diameter) are reactive-ion etched through the top SiO(2) and SiN layers of the waveguides, leaving a thin SiN… (More)

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Cite this paper

@article{Holmes2010MicroporeAN, title={Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides.}, author={Matthew G. R. Holmes and Tao Shang and Aaron R. Hawkins and Mikhail Rudenko and Philip Measor and Holger Schmidt}, journal={Journal of micro/nanolithography, MEMS, and MOEMS : JM3}, year={2010}, volume={9 2}, pages={23004} }