Microphotonics devices based on silicon microfabrication technology

@article{Tsuchizawa2005MicrophotonicsDB,
  title={Microphotonics devices based on silicon microfabrication technology},
  author={Tai Tsuchizawa and Koji Yamada and Hiroshi Fukuda and Toshio Watanabe and Jun-ichi Takahashi and Mitsutoshi Takahashi and Tetsufumi Shoji and Emi Tamechika and Seiichi Itabashi and Hiromichi Morita},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
  year={2005},
  volume={11},
  pages={232-240}
}
This work presents our recent progress in the development of an Si wire waveguiding system for microphotonics devices. The Si wire waveguide promises size reduction and high-density integration of optical circuits due to its strong light confinement. However, large connection and propagation losses had been serious problems. We solved these problems by using a spot-size converter and improving the microfabrication technology. As a result, propagation losses as low as 2.8 dB/cm for a 400/spl… CONTINUE READING

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