Micromechanical Photonic Integrated Circuits

@inproceedings{MingC2000MicromechanicalPI,
  title={Micromechanical Photonic Integrated Circuits},
  author={WU MingC. and Li Sha Fan and SU Guo-Dong},
  year={2000}
}
We report on a novel micromechanical photonic integrated circuits (PIC) for integrating free-space optical systems on a chip. Using polysilicon surface-micromachining technique, micro-optical elements, three-dimensional optomechanical structures, and microactuators are monolithically integrated on silicon substrate. We will discuss the basic building blocks… CONTINUE READING