Micromachining with picosecond double pulses on silicon and aluminium

@inproceedings{Wojakowski2009MicromachiningWP,
  title={Micromachining with picosecond double pulses on silicon and aluminium},
  author={B. Wojakowski and O. Suttmann and U. Klug and Rainer Kling},
  booktitle={LASE},
  year={2009}
}
Laser double pulses offer interesting opportunities to increase the ablation performance of ultra short laser pulses. In recent published and performed experiments we have presented an optical setup that covers delay times from some picosecond up to 20 ns as well as first experimental results of ablating aluminium and silicon. In this paper we present further results of especially interesting time domains for both materials. The ablation efficiency on silicon with inter pulse delays from 6.3 ns… CONTINUE READING

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