Micromachining of borosilicate glass surfaces using femtosecond higher-order Bessel beams

  title={Micromachining of borosilicate glass surfaces using femtosecond higher-order Bessel beams},
  author={Weibo Cheng and Pavel G Polynkin},
  journal={Journal of The Optical Society of America B-optical Physics},
  • Weibo Cheng, P. Polynkin
  • Published 2014
  • Materials Science
  • Journal of The Optical Society of America B-optical Physics
We report experimental results on micromachining of borosilicate glass slides with femtosecond higher-order Bessel beams. Transverse intensity profiles of these beams comprise concentric rings that are maintained over extended linear focus zones, facilitating machining geometries with large working distances and high aspect ratios. Both single-shot and multi-shot front-surface machining and multi-shot back-surface processing are experimentally investigated. Material removal in the latter case… Expand

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