Micromachined microwave planar spiral inductors and transformers

@inproceedings{Ribas2000MicromachinedMP,
  title={Micromachined microwave planar spiral inductors and transformers},
  author={Renato P. Ribas and J{\'e}r{\^o}me Lescot and Jean-Louis Leclercq and Jean Michel Karam and Fabien Ndagijimana},
  year={2000}
}
A new micromachined planar spiral inductor, with the strips suspended individually, has been fabricated in standard GaAs high electron-mobility transistor monolithic-microwave integrated-circuit technology through maskless front-side bulk micromachining. The electronic compatibility, the use of industrial integrated-circuit production lines, the straightforward and low-cost additional procedure for structure releasing, and the very short etching time required are the principal features related… CONTINUE READING

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References

Publications referenced by this paper.
SHOWING 1-10 OF 21 REFERENCES

GaAs MEMS design using 0.2 /spl mu/m HEMT MMIC technology

  • GaAs IC Symposium. IEEE Gallium Arsenide Integrated Circuit Symposium. 19th Annual Technical Digest 1997
  • 1997
VIEW 1 EXCERPT

Integrated circuit technology options for RFIC's-present status and future directions

  • Proceedings of CICC 97 - Custom Integrated Circuits Conference
  • 1997
VIEW 1 EXCERPT