Micromachined jets for liquid impingement cooling of VLSI chips

@article{Wang2004MicromachinedJF,
  title={Micromachined jets for liquid impingement cooling of VLSI chips},
  author={E. N. Wang and Lian Zhang and Linan Jiang and Jae-Mo Koo and J. G. Maveety and E. Sanchez and K H Goodson and T. W. Kenny},
  journal={Journal of Microelectromechanical Systems},
  year={2004},
  volume={13},
  pages={833-842}
}
Two-phase microjet impingement cooling is a potential solution for removing heat from high-power VLSI chips. Arrays of microjets promise to achieve more uniform chip temperatures and very high heat transfer coefficients. This paper presents the design and fabrication of single-jets and multijet arrays with circular orifice diameters ranging from 40 to 76 /spl mu/m, as well as integrated heater and temperature sensor test devices. The performance of the microjet heat sinks is studied using the… CONTINUE READING
Highly Cited
This paper has 50 citations. REVIEW CITATIONS

11 Figures & Tables

Topics

Statistics

05'05'06'07'08'09'10'11'12'13'14'15'16'17'18
Citations per Year

fewer than 50 Citations

Semantic Scholar estimates that this publication has 50 citations based on the available data.

See our FAQ for additional information.