Micromachined capacitive transducer arrays for medical ultrasound imaging

@article{Jin1998MicromachinedCT,
  title={Micromachined capacitive transducer arrays for medical ultrasound imaging},
  author={X. C. Jin and F. L. Degertekin and Sam Calmes and X. J. Zhang and Igal Ladabaum and B. Khuri-yakub},
  journal={1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102)},
  year={1998},
  volume={2},
  pages={1877-1880 vol.2}
}
The fabrication and characterization of micromachined capacitive ultrasonic transducers are discussed with emphasis on the array operation. Several micromachined capacitive transducer arrays have been fabricated using CMOS compatible micromachining technology. Pulse echo experiments show around 100% bandwidth and the potential for phased array imaging. Radiation pattern and cross-coupling measurements are performed on the 1-D and 2-D arrays. Cross-coupling mechanisms due to Lamb and Stoneley… CONTINUE READING

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