Microfabricated out-of-plane arrays of integrated capillary nano-electrospray emitters


This paper presents the fabrication and operation of an integrated nano-electrospray thruster consisting of an array of microfabricated silicon capillary emitters and microfabricated silicon extractor electrodes. Based on previous work in which we showed operation of single microfabricated capillaries [1], the improved thruster presented here allows… (More)


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