Microfabricated integrated sampler-injector (MISI) for micro gas chromatography

We present the design, fabrication, and preliminary performance testing of a microfabricated integrated sampler-injector (MISI) intended for use in a micro gas chromatography (µGC) system for the analysis of volatile organic compounds (VOCs). The MISI comprises a DRIE Si cavity with an integrated heater and temperature sensor that is packed with a… CONTINUE READING